product
product information
제품정보
Etcher & Air Cleaner
Etching System
applications
- Applied 2 ~ 12”(300mm size)
- ICP & TCP , RIE Etcher
- Semiconductor & Compound, Semiconductor(Metal & Oxide) etc
Glass Dryer
| Glass Size | 2G~8G (0.5~3t) |
|---|---|
| System |
|
| Remove Water Mark Size | 0~600㎛ |
| Run Tact Time | 2mm/sec |
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