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Etcher & Air Cleaner

홈으로  > Product Information  > System Business  > Etcher & Air Cleaner
Etcher & Air Cleaner

Etching System

applications

  • Applied 2 ~ 12”(300mm size)
  • ICP & TCP , RIE Etcher
  • Semiconductor & Compound, Semiconductor(Metal & Oxide) etc

Glass Dryer

Glass Size 2G~8G (0.5~3t)
System
  • I/R & Air Knife Block Ass'y
  • Air Dry Buffer Block Ass'y
  • Lamp Heater Control Box
  • Air Utility
Remove Water Mark Size 0~600㎛
Run Tact Time 2mm/sec